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Optical interconnects between silicon chips based on light-emitting diodes on nanostructured silicon
Leshok, A. A., Dolbik, A. V., Le Dinh Viа, Matskevichа, A. I., Vysotskii, V. B., Shvedov, S. V.
-emitting diodes and photodetectors. The silicon microchannel plate vias are used as light-guiding channels
3D Silicon Photonic Structures Based on Avalanche LED with Interconnections through Optical Interposer
Lazarouk, S. K., Leshok, A. A., Kozlova, T. A., Dolbik, A. V., Le Dinh Vi, Ilkov, V. K., Labunov, V. A.
interconnections through microchannel vias interposers were developed. Silicon chips placed over each other were
Optical coupling of silicon chips by microchannel vias interposer
Lazarouk, S., Leshok, A., Dolbik, A. V., Le Dinh Vi, Kozlova, T., Vysotskii, V., Shvedov, S., Saladukha, V., Labunov, V.
Optical coupling of silicon chips by microchannel vias interposer
About a contactless transmission of 10 keV electrons through tapering microchannels
Vokhmyanina, K. A., Sotnikova, V. S., Kaplii, A. A., Sotnikov, A. V., Kubankin, A. S.
About a contactless transmission of 10 keV electrons through tapering microchannels
New way for synthesis of porous silicon using ion implantation
Stepanov A., Trifonov A., Osin Y., Valeev V., Nuzhdin V.
substrate was provided. Silicon plates were implanted at energy 30 keV with doses of 7.5 × 1016 - 1.5 × 1017
Экспериментальное исследование влияния наночастиц оксида кремния на режимы двухфазного течения в Y-образном микроканале
Шебелева, Анна Андреевна, Минаков, Андрей Викторович, Пряжников, Максим Иванович, Шебелев, Александр Валерьевич, Пряжников, Андрей Иванович
Experimental study of the effect of silicon oxide nanoparticles on two-phase flow regimes in a Y-microchannel
New way for synthesis of porous silicon using ion implantation
Stepanov A., Trifonov A., Osin Y., Valeev V., Nuzhdin V.
substrate was provided. Silicon plates were implanted at energy 30 keV with doses of 7.5 × 1016 - 1.5 × 1017
Forming Porous Structures on Silicon with a Ferroelectric for Capacitive Microelectronic and Microsystems Engineering Elements
Semenova, O. V., Railko, M. Yu., Patrusheva, T. N., Merkushev, F. F., Podorozhyak, S. A., Yuzova, V. A., Korets, A. Ya., Khol’Kin, A. I.
The formation of heterostructures based on porous silicon with barium titanate for application
A proof-of-principle experiment on a new diagnostic tool for determining beam sizes from angular distributions of parametric X-ray radiation
Berdnichenko, A. V., Goponov, Yu. A., Shatokhin, R. A., Takabayashi, Y., Vnukov, I. E.
incident on a 20 μm-thick silicon crystal
Лавинные светодиоды на основе наноструктурированного кремния для оптических межсоединений
Ле Динь Ви, Лешок, А. А., Долбик, А. В., Перко, С. Л., Лазарук, С. К., Le Dinh Vi, Leshok, A. A., Dolbik, A. V., Perko, S. L., Lazarouk, S. K.
and a microchannel silicon wafer used to transmit a light signal. The study of various operating modes

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