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Spectral ellipsometry of cobalt-ions implanted silicon surface
Bazarov V., Valeev V., Nuzhdin V., Osin Y., Gumarov G., Stepanov A.
© (2015) Trans Tech Publications, Switzerland. Monocrystalline silicon wafers implanted by cobalt
Fabrication of nanoporous silicon by ion implantation
Kavetskyy T., Stepanov A.
© Springer Science+Business Media Dordrecht 2015. Ion implantation is an advanced new technological
New way for synthesis of porous silicon using ion implantation
Stepanov A., Trifonov A., Osin Y., Valeev V., Nuzhdin V.
A novel idea to create a porous silicon layers by low-energy high-dose metal-ion implantation
Spectral ellipsometry of cobalt-ions implanted silicon surface
Bazarov V., Valeev V., Nuzhdin V., Osin Y., Gumarov G., Stepanov A.
© (2015) Trans Tech Publications, Switzerland. Monocrystalline silicon wafers implanted by cobalt
Fabrication of nanoporous silicon by ion implantation
Kavetskyy T., Stepanov A.
© Springer Science+Business Media Dordrecht 2015.  Ion implantation is an advanced new
Fabrication of nanoporous silicon by ion implantation
Kavetskyy T., Stepanov A.
© Springer Science+Business Media Dordrecht 2015. Ion implantation is an advanced new technological
New way for synthesis of porous silicon using ion implantation
Stepanov A., Trifonov A., Osin Y., Valeev V., Nuzhdin V.
A novel idea to create a porous silicon layers by low-energy high-dose metal-ion implantation
Ag+-ion implantation of silicon
Stepanov A., Nuzhdin V., Valeev V., Vorobev V., Osin Y.
on the optical reflection of the Si surface layers implanted by silver ions at low energies of 30 keV over a wide
Spectral Ellipsometry and Electron Backscatter Diffraction Analyses of Silicon Surfaces Implanted with Silver Ions
Bazarov V., Nuzhdin V., Valeev V., Vorobev V., Osin Y., Stepanov A.
© 2016, Springer Science+Business Media New York.Amorphous silicon (a-Si) produced on surfaces
Fabrication of nanoporous silicon by ion implantation
Kavetskyy T., Stepanov A.
© Springer Science+Business Media Dordrecht 2015.  Ion implantation is an advanced new

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