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The effect of surfactants on superconformal deposition of electroless composites in nanoscale patternsElectroless plating of metal composites has been proposed as a promising method

Evolutionary search for new compounds in the Ti-Si systemmetal science

Applications of UV-LIGA and grayscale lithography for display technologies substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft

Metallization of Vias in Silicon Wafers to Produce Three-Dimensional Microstructures. Morpho- logical studies of the metal in the holes show that the structure of copper clusters is rather

AFM study of charging of the Au-n-GaAs contactEffect of charging of structural elements of a metal–semiconductor Au–n-GaAs contact

FMR studies of CrO2 epitaxial thin filmsHalf-metallic materials

Creation of lithographic masks using a scanning probe microscope)-based masks prepared by the SPL method are used to form metal nanoparticles of the specified sizes and shape

Перспективы золь-гель технологии для нанофотоники и микроэлектроники of nanophotonics and microelectronics on the basis of results of PhD theses, defended within the projects

Реконфигурируемые механизмы параллельной кинематики для многокоординатных систем перемещений в сборочном и оптико-механическом оборудовании микроэлектроники-drive actuators for assembly and optical-mechanical equipment of microelectronics with the enhanced cumulative

Method for stepped etching of optical glass fibers of optical glass fibers in the manufacture of microelectronic devices has been demonstrated.

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