Study of RF plasma flow at low pressure: Electron temperature influence© 2020 Published under licence by IOP Publishing Ltd.
A mathematical model of low-pressure RF
Simulation of RF plasma flowing at low pressure© 2014, Pleiades Publishing, Ltd.
A mathematical model that describes RF plasma flowing at
a Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics© Published under licence by IOP Publishing Ltd.
A mathematical model of the RF plasma flow at 0
Simulation of rarefied low pressure RF plasma flow around the sample© Published under licence by IOP Publishing Ltd.The paper describes
a mathematical model