Simulation of rarefied low pressure RF plasma flow around the sample© Published under licence by IOP Publishing Ltd.The paper describes
a mathematical model
Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics© Published under licence by IOP Publishing Ltd.
A mathematical model of the RF plasma flow at 0
Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field© 2019
A. Yu Shemakhin and V. S. Zheltukhin. In this study,
a hybrid mathematical model of
a low