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Production, Structure and Properties of Coatings Based on Al₂O₃ Obtained by Magnetron Method
Kolesnikov, D. A., Sudzhanskaya, I. V., Novikov, V. Yu., Kudryavtsev, E. A., Krytsyna, E. V.
Al₂O₃ and Al₂O₃/ZrO₂ multilayer coatings were deposited by the magnetron method by sputtering
Выбор материалов и нанотехнология изготовления комбинированного мемристорного-диодного кроссбара – основы аппаратной реализации нейропроцессора
Писарев, А. Д., Бусыгин, А. Н., Бобылев, А. Н., Ибрагим, А. Х., Губин, А. А., Удовиченко, С. Ю., Pisarev, A. D., Busygin, A. N., Bobylev, A. N., Ebrahim, A. H., Gubin, A. A., Udovichenko, S. Yu.
in which is controlled by changing the stoichiometry of the compound during reactive magnetron sputtering
Система контроля расхода газов для применения в технологии реактивного магнетронного распыления
Климович, И. М., Кулешов, В. Н., Зайков, В. А., Бурмаков, А. П., Комаров, Ф. Ф., Людчик О. Р.
Gas flow control system in reactive magnetron sputtering technology
A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering
Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.
by magnetron sputtering on the capacity of all-solid-state thin-film lithium-ion batteries (ASSLIB) was studied
A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering
Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.
by magnetron sputtering on the capacity of all-solid-state thin-film lithium-ion batteries (ASSLIB) was studied
Chemical bonding structure of TiO 2 thin films grown on n-type Si
Cetin S., Bǎleanu C., Nigmatullin R., Bǎleanu D., Ozcelik S.
Titanium dioxide thin films were obtained by RF magnetron sputtering system with different Ar and O
Research on magnetron nano-sputtering on the surface of parts made of structural ceramics after machining
Rogow V.A., Shkarupa M.I.
The method of magnetron deposition of nano-coatings on the components after finishing treatment
ZnO THIN FILMS MAGNETRON DEPOSITION IN THE Ar–H2 MEDIUM
Abduev A.Kh., Akhmedov A.K., Murliev E.K., Asvarov A.Sh.
The processes of deposition of ZnO: Ga thin films by the magnetron sputtering in the presence
Формирование и исследование характеристик терморезистивных структур на основе пленок оксида ванадия
Нгуен, Т. Д., Занько, А. И., Голосов, Д. А., Завадский, С. М., Мельников, С. Н., Колос, В. В., Толочко, Н. К., Nguyen, T. D., Zanko, A. I., Golosov, D. A., Zavadski, S. M., Melnikov, S. N., Kolos, V. V., Tоlochko, N. К.
сопротивления и ТКС. The processes of reactive magnetron sputtering of a V target in Ar/O 2 gas mixture
Optical and Tribological Properties of PVD/CVD Diamond -like Carbon Films
Golosov, D. A., Melnikov, S. N., Zavadski, S. M., Ermolenko, M. V., Голосов, Д. А.
by the combination of magnetron sputtering of graphite and plasmochemical dissociation of methane were studied

Страница 6 из 383

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