Spatially Ordered Matrix of Nanostructured Tin–Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing

Gorokh, Gennady; Bogomazova, Natalia; Taleb, Abdelhafed; Zhylinski, Valery; Galkovsky, Timur; Zakhlebayeva, Anna; Lozovenko, Andrei; Iji, Michael; Fedosenko, Vladimir; Tolstoy, Valeri

Spatially Ordered Matrix of Nanostructured Tin–Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing

Gorokh, Gennady, Bogomazova, Natalia, Taleb, Abdelhafed, Zhylinski, Valery, Galkovsky, Timur, Zakhlebayeva, Anna, Lozovenko, Andrei, Iji, Michael, Fedosenko, Vladimir, Tolstoy, Valeri

Дата публикации: 2021

Дата публикации в реестре: 2022-10-06T13:09:36Z

Аннотация:

The electrophysical and gas-sensitive properties of nanostructured Sn[x]W[y]O[z] films have been investigated. The prepared nanocomposites exhibit stable semiconductor properties characterized by high resistance and low temperature coefficient of electrical resistance of about 1.6х10[-3] K[-1]. The sensitivity of the Sn[x]W[y]O[z] films to 2 and 10 ppm concentrations of ammonia at 523 K was 0.35 and 1.17, respectively. At concentrations of 1 and 2 ppm of nitrogen dioxide, the sensitivity was 0.48 and 1.4, respectively, at a temperature of 473 K. At the temperature of 573 K, the sensitivity of 1.3 was obtained for 100 ppm of ethanol. The prepared nanostructured tin-tungsten oxide films showed promising gas-sensitivity, which makes them a good candidate for the manufacturing of gas sensors with high sensitivity and low power consumption.

Ключевые слова:
ionic layer deposition, tin-tungsten oxides, nanoporous matrixes, anodic alumina, gas sensor, осаждение ионного слоя, оксиды олова-вольфрама, нанопористые матрицы, анодный оксид алюминия, датчикb газа

Тип: Article