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Simulation of reactive magnetron sputtering system for deposition of thin filmsThis paper simulates a magnetron sputtering system based on main design features to visualize

Разрядные характеристики магнетронной распылительной системы при реактивном магнетронном распылении металлической ванадиевой мишени на постоянном и импульсном токе-vacuum reactive magnetron sputtering. The presented dependences of the deposition rate of vanadium oxide films

Влияние временных характеристик импульсного питания на дугообразование и стабильность процесса при реактивном магнетронном распылении and process stability during reactive magnetron sputtering. The paper presents the experimentally obtained

Reactive magnetron sputtering model at making Ti-TiOx coatings (mainly on pumping speed). Reactive magnetron sputtering model allows develop technology of Ti - Ti

Reactive magnetron sputtering model at making Ti-TiOx coatings (mainly on pumping speed). Reactive magnetron sputtering model allows develop technology of Ti - Ti

Формирование пленок нитрида титана методом реактивного магнетронного распыления при пониженном давленииFormation of titanium nitride films by reactive magnetron sputtering under low pressure

Surface modification of PLLA scaffolds by reactive magnetron sputtering controls the release of an incorporated drugSurface modification of PLLA scaffolds by reactive magnetron sputtering controls the release

Surface modification of polymer scaffolds by reactive magnetron sputtering controls the release of an incorporated drugSurface modification of polymer scaffolds by reactive magnetron sputtering controls the release

Efficient energy transfer from ZnO to Nd3+ ions in Nd-doped ZnO films deposited by magnetron reactive sputtering by magnetron reactive sputtering

Направления развития магнетронных распылительных систем plasma and promising technologically methods reactive magnetron sputtering.

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