Application of Thin Piezoelectric Films in DiamondBased Acoustoelectronic DevicesThe theory of external loading influence on acoustic
parameters of piezoelectric fivelayered
Optimisation of spontaneous four-wave mixing in a ring microcavity of the waveguide is studied for a specific case of a ring microcavity made of silicon
nitride. The results
Технология селективного реактивно-ионного травления нитрида кремния к поликристаллическому кремнию of external discharge characteristics on the quality
parameters of reactiveion etching of a layer of silicon
Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings-plasma source affects the
parameters of the metal-gas plasma and the element concentrations in the coatings
Microstructure of spark plasma-sintered silicon nitride ceramics-sintered silicon
nitride were investigated. Fully dense silicon
nitride ceramics with a typical α-Si₃N₄ equiaxed
RF-Magnetron sputtering of silicon carbide and silicon nitride films for solar cells for obtaining thin silicon carbide and silicon
nitride films, that are used for constructing solar cells based