Software Control System for Equipment of Integrated Circuit Layout InspectionDoudkin, A.,
Voronov, A.,
Ganchenko, V.,
Дудкин, А. А.,
Ганченко, В. В.,
Воронов, А. А. of critical sizes
inspection for
layouts of integrated circuit on basis of computer vision. Advantages
Методы автоматического контроля топологии планарных структур и их реализация в электронном машиностроении of the technique selection methods for the
layout automatic inspection and creation of an algorithmic basis
Обобщенная архитектура программного комплекса управления оборудованием контроля критических размеров на базе систем машинного зренияАваков, С. М.,
Дудкин, А. А.,
Воронов, А. А.,
Ганченко, В. В.,
Рымко, В. М.,
Шоломицкий, В. Г.,
Avakov, S.,
Voronov, А.,
Doudkin, A.,
Ganchenko, V.,
Rymko, V.,
Sholomicki, V. inspection of integrated circuit
layouts on the basis of computer vision. The advantages of the developed
Автоматический контроль микродефектов на полупроводниковых пластинах is impossible. EM-6429
Automatic Patterned Wafer Micro Defect
Inspection Tool is a solution to many problems
The digital ultrasonic interferometer for quality inspection of piezoelectric crystals hypersonic method for quality
inspection of piezoelectric crystals. The method is grounded on
automatic The digital ultrasonic interferometer for quality inspection of piezoelectric crystals hypersonic method for quality
inspection of piezoelectric crystals. The method is grounded on
automatic