Reactive ion etching parameters optimization in victory processA simulation of reactive ion etching (RIE) was carried out using Victory
Process of Silvaco
The Information System of Evolution Control of Multistage Processes of Production and Technical Systems in Fuzzy Dynamic EnvironmentsPaluh, B. V.,
Vetrov, A. N.,
Egereva, I. A.,
Kozlova, Yu. G.,
Палюх, Б. В.,
Ветров, А. Н.,
Егерева, И. А.,
Козлова, Ю. Г. The article takes up the information model of
evolution control of multistage
processes in fuzzy